Investigation of plasma characteristics of center region of post cylindrical magnetron sputtering device

Rahman R. Abdula

Article Details

Investigation of plasma characteristics of center region of post cylindrical magnetron sputtering device

Authors:

Rahman R. Abdula

Publisher:

University of Baghdad

Journal:

Iraqi Journal of Physics Vol.8 Issue 11, pp.33-40

Document Type:

Article

Publication Date:

1/2010

Document Language:

English

Document ID (Org No.):

2001368622

pISSN:

2664-5548

Keywords:

cylindrical magnetron sputtering plasma characteristics

Abstract:

 A d.c. magnetron sputtering system was designed and fabricated. The chamber of this system is consisted from two copper coaxial cylinders. The inner one used as the cathode and the outer one used as anode with magnetic coil located on the outer cylinder (anode). The axial behavior of the magnetic field strength along the cathode surface for various coil current (from 2A to 14A) are shown. The results of this work are investigated by three cylindrical Langmuir probes that have different diameters that are 2.2mm, 1mm, and 0.45mm. The results of these probes show that, there are two Maxwellian electron groups appear in the central region. As well as, the density of electron and ion decreases with increases of magnetic field strengths.

Article Details

Investigation of plasma characteristics of center region of post cylindrical magnetron sputtering device

Authors: Rahman R. Abdula

Publisher: University of Baghdad

Journal: Iraqi Journal of Physics Vol.8 Issue 11, pp.33-40

Document Type: Article

Publication Date: 1/2010

Document Language: English

Document ID (Org No.): 2001368622

pISSN: 2664-5548

cylindrical magnetron sputtering plasma characteristics

Issues

Authors:

Rahman R. Abdula

Publisher:

University of Baghdad

Journal:

Iraqi Journal of Physics Vol.8 Issue 11, pp.33-40

Document Type:

Article

Publication Date:

1/2010

Document Language:

English

Document ID (Org No.):

2001368622

pISSN:

2664-5548